Micro-resonator, band-pass filter, semiconductor device and...

Details Micro-resonator, band-pass filter, semiconductor device and... Micro-resonator, band-pass filter, semiconductor device and...

2008-09-02

2008-09-02

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000

Reexamination Certificate

active

11344842

ABSTRACT:
A micro-resonator of a single structure which outputs signals of two resonance frequencies of mutually opposite phases and in which different resonance frequencies are adjusted independently is provided. The micro-resonator includes: an oscillation portion6sustained with a gap by support portions8 [8A,8B] and an input electrode3and an output electrode4that become lower electrodes facing the oscillation portion6across the gap, in which the input electrode3and the output electrode4are disposed to face each other along a line intersecting the oscillation portion6, the oscillation portion6generates torsional oscillation and flexural oscillation, and output signals of two resonance frequencies close to each other based on different resonance modes have mutually different phases by 180°.

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patent: 2003/0184412 (2003-10-01), Gorrell
patent: 2007/0052497 (2007-03-01), Tada
patent: 2007/0171001 (2007-07-01), Naniwada et al.
C. T-Nguyen, Micromechanical components for miniaturized low-power communications (invited plenary), proceedings, 1999 IEEE MTT-S International Microwave Symposium RF MEMS Workshop, Jun. 18, 1999, pp. 48-77.

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