Optical: systems and elements – Optical modulator
Reexamination Certificate
2008-07-01
2008-07-01
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
C359S290000, C359S291000, C359S578000, C430S005000
Reexamination Certificate
active
11169587
ABSTRACT:
A method of calculating an aerial image of a spatial light modulator array includes calculating pair-wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pair-wise interference and the effective graytones. The graytones depend only on the modulation states of the pixels. The pair-wise interference depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pair-wise interference can be represented by a matrix of functions. The pair-wise interference can be represented by a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
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ASML Holding N.V.
Ben Loha
Sterne Kessler Goldstein & Fox P.L.L.C.
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