Servo system for a two-dimensional micro-electromechanical...

Details Servo system for a two-dimensional micro-electromechanical... Servo system for a two-dimensional micro-electromechanical...

2008-07-01

2008-07-01

Donovan, Lincoln (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C318S560000, C318S568180, C318S649000, C318S677000

Reexamination Certificate

active

11240833

ABSTRACT:
A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.

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