Method of fabricating a head for perpendicular magnetic...

Details Method of fabricating a head for perpendicular magnetic... Method of fabricating a head for perpendicular magnetic...

2008-05-06

2008-05-06

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603120, C029S603130, C029S603140, C029S603160, C029S603180, C360S122000, C360S125020, C216S022000, C216S041000

Reexamination Certificate

active

11354139

ABSTRACT:
A method is provided for fabricating a head for perpendicular recording with self-aligning side shields. The voids where the side shields will be formed are milled into the layer of material for the pole tip to achieve self-alignment. A mask is patterned with openings defining initial shape of the pole piece tip nearest the air-bearing surface including the width and the point at which the pole tip widens out. A film of soft magnetic material to form the side shields is deposited over the wafer. A chemical-mechanical-polishing process is preferably used to remove the mask and the material deposited on it. A new mask is patterned over the predetermined area for the final shape of the pole tip and the side shields. The excess side shield material and pole tip material outside of the mask is then removed.

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