Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2008-05-27

2008-05-27

Duda, Kathleen (Department: 1795)

Photocopying

Projection printing and copying cameras

Step and repeat

C250S491100

Reexamination Certificate

active

10356727

ABSTRACT:
A lithographic projection apparatus includes an alignment sensor having an electron beam source constructed and arranged to provide an electron beam for impinging on an alignment marker on a substrate, and a back-scattered electron detector constructed and arranged to detect electrons back-scattered from the alignment marker. The alignment sensor is independent of the projection system and beam of radiation, and is an off-axis alignment sensor.

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patent: 1 150 173 (2001-10-01), None
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patent: 2001-85303 (2001-03-01), None

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