Verification of non-recurring defects in pattern inspection

Details Verification of non-recurring defects in pattern inspection Verification of non-recurring defects in pattern inspection

2008-01-08

2008-01-08

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C382S145000, C382S147000

Reexamination Certificate

active

11072235

ABSTRACT:
A system and method for verifying defects in electrical circuit patterns including supplying a plurality of like electrical circuit patterns to a defect verification assembly after identification of candidate defects at an automated inspection assembly; verifying selected candidate defects as being one of: an actual defect, other than an actual defect; and marking a candidate defect in response to a recurrence of a given candidate defect at substantially corresponding locations on at least two electrical circuit patterns.

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