Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate
2008-03-18
2008-03-18
Ha, Nguyen T. (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
C361S278000, C361S283100, C361S290000, C361S291000
Reexamination Certificate
active
11128407
ABSTRACT:
A method is provided of continuously varying the capacitance of a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and a dielectric element mounted thereon, and the base portion having a second capacitance plate mounted thereon. The method includes applying a first actuation voltage to deform the cantilever assembly until the dielectric element contacts the second capacitance plate leaving a gap therebetween, and applying a second actuation voltage larger than the first actuation voltage to further deform the cantilever assembly to reduce the gap between the dielectric element and the second capacitance plate.
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Chang David
Hsu Tsung-Yuan
Christie Parker & Hale
Ha Nguyen T.
HRL Laboratories LLC
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