Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2008-01-22
2008-01-22
Heinrich, Samuel M. (Department: 1725)
Coating apparatus
Gas or vapor deposition
With treating means
C156S345520, C156S345530, C250S427000
Reexamination Certificate
active
10821081
ABSTRACT:
An electron bombardment heating apparatus, in which thermions emitted from filaments9are accelerated and impinge upon a heating plate2, so as to heat the heating plate2, wherein a peripheral wall of a heated material supporting member1having a heating plate as a ceiling thereof is made of multi-staged peripheral wall portions13aand13b, positioned vertically and having a different radius, and those peripheral wall portions13aand13bare connected with each other by means of a ring-like horizontal wall5. With this, thermal stress can be mitigated, which is caused due to a difference in temperature between the lower end portion of the heated material supporting member1and the heating plate2when heating up the heating plate2, thereby causing no breakage in the heated material supporting member when conducting heating and cooling upon the heating plate, repetitively.
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Flynn ,Thiel, Boutell & Tanis, P.C.
Heinrich Samuel M.
Sukegawa Electric Co., Ltd.
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