Lithographic apparatus, device manufacturing method and...

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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C355S030000

Reexamination Certificate

active

11067492

ABSTRACT:
A lithographic apparatus is disclosed that has a semi-permeable membrane, a liquid inlet adapted to supply liquid to a first side of the membrane, and a gas inlet adapted to supply to a second side of the membrane either: (a) a vapor of the liquid, or (b) a gas which dissociates when dissolved in the liquid.

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