Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1995-06-07
1997-06-03
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350412, 7350416, G01P 904
Patent
active
056356390
ABSTRACT:
A micromechanical tuning fork gyroscope includes a suspended structure comprising at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis normal to the rotation sensitive axis. The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.
REFERENCES:
patent: Re32931 (1989-05-01), Staudte
patent: Re33479 (1990-12-01), Juptner et al.
patent: 3053095 (1962-09-01), Koril et al.
patent: 3251231 (1966-05-01), Hunt et al.
patent: 3370458 (1968-02-01), Dillon
patent: 3696429 (1972-10-01), Tressa
patent: 3913035 (1975-10-01), Havens
patent: 4044305 (1977-08-01), Oberbeck
patent: 4122448 (1978-10-01), Martin
patent: 4144764 (1979-03-01), Hartzell, Jr.
patent: 4155257 (1979-05-01), Wittke
patent: 4234666 (1980-11-01), Gursky
patent: 4321500 (1982-03-01), Paros et al.
patent: 4336718 (1982-06-01), Washburn
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4406992 (1983-09-01), Kurtz et al.
patent: 4411741 (1983-10-01), Janata
patent: 4414852 (1983-11-01), McNeill
patent: 4447753 (1984-05-01), Ochiai
patent: 4468584 (1984-08-01), Nakamura et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4484382 (1984-11-01), Kawashima
patent: 4490772 (1984-12-01), Blickstein
patent: 4495499 (1985-01-01), Richardson
patent: 4499778 (1985-02-01), Westhaver et al.
patent: 4502042 (1985-02-01), Wuhrl et al.
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4524619 (1985-06-01), Staudte
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4585083 (1986-04-01), Nishiguchi
patent: 4590801 (1986-05-01), Merhav
patent: 4592242 (1986-06-01), Kempas
patent: 4596158 (1986-06-01), Strugach
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4600934 (1986-07-01), Aine et al.
patent: 4619001 (1986-10-01), Masuda et al.
patent: 4628283 (1986-12-01), Reynolds
patent: 4629957 (1986-12-01), Walters et al.
patent: 4639690 (1987-01-01), Lewis
patent: 4644793 (1987-02-01), Church
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4653326 (1987-03-01), Danel et al.
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4665605 (1987-05-01), Kempas
patent: 4670092 (1987-06-01), Motamedi
patent: 4671112 (1987-06-01), Kimura et al.
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4674331 (1987-06-01), Watson
patent: 4679434 (1987-07-01), Stewart
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4706374 (1987-11-01), Murkami
patent: 4712439 (1987-12-01), North
patent: 4727752 (1988-03-01), Peters
patent: 4735506 (1988-04-01), Pavlath
patent: 4736629 (1988-04-01), Cole
patent: 4743789 (1988-05-01), Puskas
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4747312 (1988-05-01), Herzl
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4761743 (1988-08-01), Wittke
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4783237 (1988-11-01), Aine et al.
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4792676 (1988-12-01), Hojo et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4808948 (1989-02-01), Patel et al.
patent: 4815472 (1989-03-01), Wise et al.
patent: 4834538 (1989-05-01), Heeks et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4855544 (1989-08-01), Glenn
patent: 4869107 (1989-09-01), Murakami
patent: 4881410 (1989-11-01), Wise et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4890812 (1990-01-01), Chechile et al.
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4898032 (1990-02-01), Voles
patent: 4899587 (1990-02-01), Staudte
patent: 4900971 (1990-02-01), Blake et al.
patent: 4916520 (1990-04-01), Kurashima
patent: 4922756 (1990-05-01), Henrion
patent: 4929860 (1990-05-01), Hulsing, II et al.
patent: 4981359 (1991-01-01), Tazartes et al.
patent: 5001383 (1991-03-01), Kawashima
patent: 5013396 (1991-05-01), Wise et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang
patent: 5038613 (1991-08-01), Takenaka et al.
patent: 5055838 (1991-10-01), Wise et al.
patent: 5060039 (1991-10-01), Weinberg et al.
patent: 5090809 (1992-02-01), Ferrar
patent: 5094537 (1992-03-01), Karpinski, Jr.
patent: 5138883 (1992-08-01), Paquet et al.
patent: 5195371 (1993-03-01), Greiff
patent: 5203208 (1993-04-01), Bernstein
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5233874 (1993-08-01), Putty et al.
patent: 5241861 (1993-09-01), Hulsing, II
Barth, P.W. et al., "A Monolithic Silicon Accelerometer With Integral Air Damping and Overrange protection", 1988 IEEE, pp. 35-38.
Boxenhorn, B., et al., "An Electrostatically Rebalanced Micromechanical Accelerometer," AIAA Guidance, Navigation and Control Conference, Boston, Aug. 14-16, 1989, pp. 118-122.
Boxenhorn, B., et al., "Micromechanical Inertial Guidance System and its Application", Fourteenth Biennial Guidance Test Symposium, vol. 1, Oct. 3-5, 1989, pp. 113-131.
Boxenhorn, B., et al., "Monolithic Silicon Accelerometer", Transducers '89, Jun. 25-30, 1989, pp. 273-277.
Boxenhorn, B., et al., "A Vibratory Micromechanical Gyroscope", AIAA Guidance, Navigation and Control Conference, Minneapolis, Aug. 15-17, 1988, pp. 1033-1040.
Howe, R., et al., "Silicon Micromechanics: Sensors and Actuators on a Chip", IEEE Spectrum, Jul. 1990, pp. 29-35.
Moskalik, L., "Tensometric Accelerometers with Overload Protection", Meas. Tech. (USA), vol. 22, No. 12, Dec. 1979 (publ. May 1980), pp. 1469-1471.
Nakamura, M., et al., "Novel Electrochemical Micro-Machining and Its Application for Semiconductor Acceleration Sensor IC", Digest of Technical Papers (1987), Institute of Electrical Engineers of Japan, pp. 112-115.
Petersen, K.E., et al., "Micromechanical Accelerometer Integrated with MOS Detection Circuitry", IEEE, vol. Ed-29 No. 1 (Jan. 1982), pp. 23-27.
Petersen, Kurt E., et al., "Silicon as a Mechanical Material", Proceedings of the IEEE, vol. 70, No. 5, May 1982 pp. 420-457.
"Quartz Rate Sensor Replaces Gyros", Defense Electronics, Nov. 1984, p. 177.
Rosen, Jerome, "Machining In the Micro Domain", Mechanical Engineering, Mar. 1989, pp. 40-46.
Teknekron Sensor Development Corporation, article entitled "Micro-Vibratory Rate Sensor", 1080 Marsh Road, Menlo Park, CA 94025, 2 pages, undated.
Bryzek, Janusz et al., "Micromachines on the March", IEEE Spectrum, May 1994, pp. 20-31.
J. Bernstein et al., "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope," IEEE Robotics & Automation Soc, in coop. w/ASME Dynamic Systems & Control Div., Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, IEEE Cat. #93CH3265-6, Library of Congress #92-56273, Ft. Lauderdale, FL 2/7-10/93, pp. 143-148.
Boxenhorn Burton
Greiff Paul
Chapman John E.
The Charles Stark Draper Laboratory Inc.
LandOfFree
Micromechanical tuning fork angular rate sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromechanical tuning fork angular rate sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromechanical tuning fork angular rate sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-392745