Apparatus and methods for the inspection of microvias in...

Details Apparatus and methods for the inspection of microvias in... Apparatus and methods for the inspection of microvias in...

2008-05-13

2008-05-13

Spector, David N. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C382S145000, C382S147000, C348S126000, C348S131000, C356S237500

Reexamination Certificate

active

11517924

ABSTRACT:
An imaging method and imaging system for inspecting features located at a known inter-feature pitch on portions of a target surface. The system includes a lens array having a plurality of lenses wherein the lenses of the lens array have an inter-lens pitch and an inter-field of view pitch corresponding to the inter-feature pitch, and an array of imaging elements having an inter-element pitch corresponding to the inter-feature pitch, whereby the imaging system images only field of view areas of the target surface containing features.

REFERENCES:
patent: 6697154 (2004-02-01), Owen et al.
patent: 7203355 (2007-04-01), Levi et al.
patent: 2005/0190959 (2005-09-01), Kohler et al.

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