Distance measuring interferometer and method of use

Details Distance measuring interferometer and method of use Distance measuring interferometer and method of use

1983-11-03

1986-08-19

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356358, G01B 902

Patent

active

046066381

ABSTRACT:
Apparatus is disclosed for the measurement of the absolute distance between a plano test and a plano reference surface which are in close proximity to each other. The preferred way of accomplishing this is with a polarization phase modulated Fizeau interferometer in which the reference surface is a front surface polarizer. The modulated interference pattern is photosensed with an array camera, and the signals processed to provide the absolute distance between the plano test surface and the plano reference surface. A method is also disclosed, using the instant invention, for determining the flying height of a magnetic head assembly used in computer mass storage systems.

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