Fluid thermal mass flow sensor

Details Fluid thermal mass flow sensor Fluid thermal mass flow sensor

1996-05-23

1998-08-11

Dombroske, George M.

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

057929521

ABSTRACT:
A fluid thermal mass flow meter including a composite flow tube having four tubular segments of high thermal conductivity formed in a length of tube made of a material having a relatively low thermal conductivity, a thin film element formed on the surface of and extending around each of the four tubular segments, circuitry for incorporating the elements into a bridge circuit, and a housing for containing the flow tube, elements, and circuitry.

REFERENCES:
patent: 1222492 (1917-04-01), Thomas
patent: 1261086 (1918-04-01), Wilson et al.
patent: 2067645 (1937-01-01), Pinkerton
patent: 2729976 (1956-01-01), Laub
patent: 3181357 (1965-05-01), Benson
patent: 3229522 (1966-01-01), Benson
patent: 3938384 (1976-02-01), Blair
patent: 4056975 (1977-11-01), LeMay
patent: 4433575 (1984-02-01), Rutherford
patent: 4440021 (1984-04-01), Abouchar et al.
patent: 4464932 (1984-08-01), Ewing et al.
patent: 4487062 (1984-12-01), Olin et al.
patent: 4517838 (1985-05-01), Wachi et al.
patent: 4519246 (1985-05-01), Hartemink
patent: 4548075 (1985-10-01), Mariano
patent: 4616505 (1986-10-01), Jouwsma
patent: 4672997 (1987-06-01), Landis et al.
patent: 4686856 (1987-08-01), Vavra et al.
patent: 4815280 (1989-03-01), Tujimura et al.
patent: 4829818 (1989-05-01), Bohrer
patent: 4921005 (1990-05-01), Ohmi et al.
patent: 4984460 (1991-01-01), Isoda
patent: 5191793 (1993-03-01), Drexel et al.
patent: 5279154 (1994-01-01), Vavra et al.
patent: 5280264 (1994-01-01), Yajima et al.
patent: 5309762 (1994-05-01), Satoh et al.
patent: 5337604 (1994-08-01), Van Bavel et al.
patent: 5373737 (1994-12-01), Hwang
patent: 5398549 (1995-03-01), Suzuki
patent: 5410912 (1995-05-01), Suzuki
patent: 5461913 (1995-10-01), Hinkle et al.
Tison, S.A.; A Critical Evaluation of Thermal Mass Flow Meters, National Institute of Standards and Technology, pp. 1-38.
Hinkle, L.D., et al., Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller, J.Vac. Sci. Technol. A 9 (3) (American Vacuum Society), pp. 2043-2047.
Rutherford, Ralph E.; Gas Flow Control With Thermal Mass Flow Measurement, Measurements & Control, pp. 132-136.
Olin, J.G.; Process Gas Mass Flow Controllers: An Overview, Solid State Technology, pp. 58-60.
Ginesi, Donald, et al.; Full-Bore Flowmeters, Chemical Engineering, pp. 103-118.
Sullivan, John J.; Flow Measurement and Control in Vacuum Systems for Microelectronics Processing, Solid State Technology, pp. 113-118.
Baker, William C., et al.; The Measurement of Gas Flow Part II, Journal of the Air Pollution Control Association, pp. 156-162.
Baker, William C., et al.; The Measurement of Gas Flow Part I, Journal of the Air Pollution Control Association, pp. 66-72.
Widmer, A.E., et al. A calibration system for calorimetric mass flow devices, The Institute of Physics, pp. 213-220.
LeMay, Dan B.; A practical guide to gas flow control, Instruments & Control Systems, pp. 73-77.
Lomas, D.J.; Selective the Right Flowmeter, Part II: Comparing candidates, Instrumentation Technology, pp. 71-77.
Lomas, D.J.; Selecting the Right Flowmeter, Part I: The six favorites, Instrumentation Technology, pp. 55-62.
Benson, James M., et al.; Thermal Mass Flowmeter, Instruments and Control Systems, pp. 85-87.
Laub, J.H.; Measuring Mass Flow with the boundary-layer flowmeter, Control Engineering, pp. 112-117.
Laub, J.H.; An Electric Flow Meter, Electrical Engineering, pp. 1216-1219.

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