Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2008-07-29
2008-07-29
Fuller, Rodney E (Department: 2862)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S053000, C355S055000
Reexamination Certificate
active
10921097
ABSTRACT:
An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage and a substrate stage. A magnification reflective optical system images the reticle onto the substrate. The system may be a 2× magnification system, or another magnification that is compatible with currently available mask sizes. By writing reticles with circuit pattern dimensions that are one-half the desired size for an FPD, a 2× optical system can be used to expose FPDs. The designs for the 1.5× and larger magnification optical systems all typically have at least three powered mirrors. A corrector, positioned either near the reticle or near the substrate, can be added to the three mirror design to improve the systems optical performance. The corrector may be a reflective, or a refractive design. The corrector can have an aspheric surface, and optionally a powered surface.
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de Jager Patrick
Gui Cheng-Qun
Harned Noreen
Harned Robert D.
Pozhinskaya Irina
ASML Holding N.V.
Fuller Rodney E
Sterne Kessler Goldstein & Fox P.L.L.C.
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