Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-07-22
2008-07-22
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C264S297600
Reexamination Certificate
active
11017569
ABSTRACT:
A method is provided that includes providing a mold on a temporary substrate, e.g., a sapphire substrate. Next, a material such as PZT paste is deposited into the mold. Then, the mold is removed to obtain elements formed by the mold. The formed elements will then be sintered. After sintering, electrode deposition is optionally performed. The sintered elements are then bonded to a final target substrate and released from the temporary substrate through laser liftoff. Further, electrodes may also be optionally deposited at this point.
REFERENCES:
patent: 5676906 (1997-10-01), Hirata
patent: 6113836 (2000-09-01), Sakai et al.
patent: 6375880 (2002-04-01), Cooper et al.
patent: 6605293 (2003-08-01), Giordano et al.
patent: 6669801 (2003-12-01), Yoshimura et al.
patent: 2002/0066524 (2002-06-01), Kagawa et al.
patent: 2002/0066525 (2002-06-01), Wada et al.
patent: 2004/0164650 (2004-08-01), Xu et al.
patent: 1 453 103 (2004-09-01), None
Partial European Search Report
Victor F. Janas and Ahmad Safari, “Overview of Fine-Scale Piezoelectric Ceramic/Polymer Composite Processing”, J. Am. Ceram. Soc., 78 [11], 2945-55 (1995).
R. K. Panda, V. F. Janas and A. Safari, “Fabrication and Properties of Fine Scale 1-3 Piezocomposites by Modified Lost Mold Method”, Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics, 551-554 (1996).
S. Stark, A. Schonecker and W. Gebhardt, “Fine Scale Piezoelectric 1-3 Composites: A New Approach of Cost Effective Fabrication”, Proceedings of the Eleventh IEEE International Symposium on Applications of Ferroelectrics, 393-396 (1998).
S. Gebhardt and A. Schonecker, “Fine Scale Piezoelectric 1-3 Composites by Soft-Molding”, Materials Mechanics, Fracture Mechanics, Micro Mechanics, www.ikts.fhg.de, 5 pages (Preprint 1999).
Sylvia Gabhardt, Andreas Schonecker, Ralf Steinhausen, Tilo Hauke, Wolfgang Seifert and Horst Beige, “Fine Scale 1-3 Composites Fabricated by the Soft Mold Process: Preparation and Modeling”, Ferroelectrics, vol. 241, 67-73 (2000).
S. Gebhardt, A. Schonecker, R. Steinhausen, W. Seifert, H. Beige, “Quasistatic and Dynamic Properties of 1-3 Composites Made by Soft Molding”, J. European Ceram. Soc., 23, 153-159 (2003).
Nobuyuki Futai, Kiyoshi Matsumoto and Isao Shimoyama, “Fabrication of High-Aspect-Ratio PZT Thick Film Structure using Sol-Gel Technique and Su-8 Photoresist”, The Institute of Electrical and Electronic Engineers, 168-171 (2002).
Buhler Steven A.
White Stephen D.
Xu Baomin
Fay Sharpe LLP
Nguyen Tai
Palo Alto Research Center Incorporated
Tugbang A. Dexter
LandOfFree
Method for forming ceramic thick film element arrays with... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for forming ceramic thick film element arrays with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming ceramic thick film element arrays with... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3905983