Microresonator, manufacturing method, and electronic apparatus

Details Microresonator, manufacturing method, and electronic apparatus Microresonator, manufacturing method, and electronic apparatus

2007-10-23

2007-10-23

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S187000, C333S189000, C438S050000, C438S053000

Reexamination Certificate

active

11264344

ABSTRACT:
The present invention provides a microresonator including a plurality of resonator elements arranged on a plurality of columns on a substrate. The resonator elements each have an input electrode, an output electrode, and a diaphragm that extends in a certain direction, and each pass a signal of a certain frequency. The plurality of resonator elements includes a plurality of first resonator elements arranged on first columns that are located on every other column of the plurality of columns, and having a first phase, and a plurality of second resonator elements arranged on second columns that are located on every other column, other than the first columns, of the plurality of columns, and having a second phase that is an opposite phase of the first phase.

REFERENCES:
patent: 5698928 (1997-12-01), Mang et al.
patent: 6486751 (2002-11-01), Barber et al.
patent: 6828877 (2004-12-01), Nakanishi et al.
patent: 7227432 (2007-06-01), Lutz et al.
patent: 2003/0222732 (2003-12-01), Matthaei

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