Method of manufacturing surface acoustic wave device

Details Method of manufacturing surface acoustic wave device Method of manufacturing surface acoustic wave device

2007-08-07

2007-08-07

Trinh, Minh (Department: 3729)

Metal working

Piezoelectric device making

C228S121000, C310S31300R, C310S363000, C333S193000

Reexamination Certificate

active

10304764

ABSTRACT:
Disclosed is a method of manufacturing a surface acoustic wave device comprising the steps of forming a drive electrode having a surface acoustic wave element function on a piezoelectric substrate wafer, providing a resist coat on an upper region of the drive electrode, covering the resist coat with a metal film, removing the resist coat lying within the metal film so that the metal film is formed in a dome form having a hollow portion covering the drive electrode, and providing a resin seal on the metal film.

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