Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2007-02-13
2007-02-13
Nguyen, Ha Tran (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
Reexamination Certificate
active
11145964
ABSTRACT:
The present invention is a method of measuring capacitance of micro structures in an integrated circuit wherein the micro structure includes a first terminal and a second terminal separated by an insulator and at least a third terminal separated from the first terminal by an insulator. The method comprises applying biasing voltage to the second terminal and applying the same potential to the first and third terminals. An electrical characteristic between the first and second terminals are measured to determined the capacitance between the first and second terminals.
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Masami Yakabe
Toshiyuki Matsumoto
Yoshihiro Hirota
Barnes & Thornburg LLP
Nguyen Ha Tran
Nguyen Tung X.
Tokyo Electron Limited
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