Purification of silane gas

Details Purification of silane gas Purification of silane gas

1988-10-24

1990-12-11

Straub, Gary P.

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

55 74, 55 75, C01B 3304, B01D 5302

Patent

active

049769448

ABSTRACT:
Impure gaseous silane containing such impurities as, in particular, phosphines and arsines, is purified, whether by chemisorption and/or physical adsorption, by contacting such silane gas with a sorption mass that includes cooper values, e.g., a copper cation-exchanged molecular sieve.

Affiliated with

Also associated with

Rating

Purification of silane gas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Purification of silane gas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Purification of silane gas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-388868