Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-02-20
2007-02-20
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S295000, C359S298000, C359S350000, C359S847000
Reexamination Certificate
active
11060870
ABSTRACT:
The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 6433411 (2002-08-01), Degani et al.
patent: 6515791 (2003-02-01), Hawwa et al.
Bishop David John
Goossen Keith Wayne
Greywall Dennis S.
Walker James Albert
Agere Systems Inc.
Lester Evelyn A.
Lucent Technologies - Inc.
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