Micro electrical mechanical system (MEMS) tuning using...

Details Micro electrical mechanical system (MEMS) tuning using... Micro electrical mechanical system (MEMS) tuning using...

2007-10-16

2007-10-16

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

11148389

ABSTRACT:
A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.

REFERENCES:
patent: 392650 (1888-11-01), Watrous
patent: 3879992 (1975-04-01), Bartera
patent: 3969640 (1976-07-01), Staudte
patent: 4092588 (1978-05-01), Desormiere et al.
patent: 4561286 (1985-12-01), Sekler et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5283037 (1994-02-01), Baer et al.
patent: 5334303 (1994-08-01), Muramatsu et al.
patent: 5407525 (1995-04-01), Michel et al.
patent: 5580419 (1996-12-01), Berenz
patent: 5646346 (1997-07-01), Okada
patent: 5662782 (1997-09-01), Gomi et al.
patent: 5665915 (1997-09-01), Kobayashi et al.
patent: 5705399 (1998-01-01), Larue
patent: 5728583 (1998-03-01), Kawakami et al.
patent: 5783749 (1998-07-01), Lee et al.
patent: 5894090 (1999-04-01), Tang et al.
patent: 5905202 (1999-05-01), Kubena et al.
patent: 5920012 (1999-07-01), Pinson
patent: 5932953 (1999-08-01), Drees et al.
patent: 6009751 (2000-01-01), Ljung
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6114795 (2000-09-01), Tajima et al.
patent: 6164134 (2000-12-01), Cargille
patent: 6232846 (2001-05-01), Hirano et al.
patent: 6289733 (2001-09-01), Challoner et al.
patent: 6367786 (2002-04-01), Gutierrez et al.
patent: 6462460 (2002-10-01), Tikka et al.
patent: 6515278 (2003-02-01), Wine et al.
patent: 6570468 (2003-05-01), Ma et al.
patent: 6629460 (2003-10-01), Challoner
patent: 6698287 (2004-03-01), Kubena et al.
patent: 6922118 (2005-07-01), Kubena et al.
patent: 6975184 (2005-12-01), Wang et al.
patent: 44 42 033 (1996-05-01), None
patent: 96/38710 (1996-12-01), None
patent: 98/15799 (1998-04-01), None
Barbour, N., et al., “Micromechanical Silicon Instrument and Systems Development at Draper Laboratory,”AIAA Guidance Navigation and Control Conference, American Institute of Aeronautics and Astronautics, San Diego, CA, Paper No. 96-3709, pp. 1-7 (Jul. 29-31, 1996).
Daniel, J.H., et al., “Focused Ion Beams for Microfabrication,”Institution of Electrical Engineers Colloquium Digest No. 1997/081, pp. 9/1-9/6 (Nov. 1997).
Duwel, A., et al., “Quality Factors of MEMS Gyros and the Role of Thermoelastic Damping,”IEEE, pp. 214-219 (Jan. 20-24, 2002).
“IJT: Ink Jet Technology Inc.,”Basic Evaluation Kit, Rev. 1.0, 1 page. Internet: <www.INKJET-TECH.com>.
Johnson, J.D., et al., “Surface Micromachined Angular Rate Sensor,”SAI Conference, Paper No. 950538, pp. 77-83 (1995).
Putty, M.W., et al., “A Micromachined Vibrating Ring Gyroscope,”Solid-State Sensor and Actuator Workshop, pp. 213-220 (Jun. 13-16, 1994).
Syms, R.R.A. and D.R. Moore, “Focused Ion Beam Tuning of In-Plane Vibrating Micromechanical Resonators,”Electronics Letters, vol. 35, No. 15, pp. 1277-1278 (Jul. 1999).
Tang, T.K., et al., “Silicon Bulk Micromachined Vibratory Gyroscope,”Solid State Sensor and Actuator Workshop, Transducer Research Foundation, Hilton Head, South Carolina, 6 pages (Jun. 2-6, 1996).
Weinberg, M., et al., “Microelectromechanical Instrument and Systems Development at the Charles Stark Draper Laboratory, Inc.,”IEEE, pp. 8.5-33--8.4-40 (Oct. 26-30, 1997).
Wright, D., et al., “The HRG Applied to a Satellite Attitude Reference System,”Guidance and Control, American Astronautical Society, Advances in Astronautical Sciences, pp. 1-13 (1994).

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