Interlayer insulating film, method for forming the same and...

Details Interlayer insulating film, method for forming the same and... Interlayer insulating film, method for forming the same and...

2007-06-19

2007-06-19

Choi, Ling-Sui (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C526S316000, C526S308000, C526S309000

Reexamination Certificate

active

10622515

ABSTRACT:
The interlayer insulating film of this invention is composed of a polymer in which a first monomer having four substituted acetylenyl groups and polymerizable in the three-dimensional direction and a second monomer having two substituted cyclopentanonyl groups and polymerizable in the two-dimensional direction are three-dimensionally polymerized.

REFERENCES:
patent: 2232867 (1941-02-01), Reppe et al.
patent: 1 170 273 (2002-01-01), None
patent: 2001-332543 (2001-11-01), None
patent: P2001-332543 (2001-11-01), None
patent: WO 97/22631 (1997-06-01), None

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