Versatile method and system for single mode VCSELs

Details Versatile method and system for single mode VCSELs Versatile method and system for single mode VCSELs

2007-12-11

2007-12-11

Nguyen, Dung (Michael) T. (Department: 2828)

Coherent light generators

Particular active media

Semiconductor

C372S050124

Reexamination Certificate

active

10617892

ABSTRACT:
A single mode VCSEL including a substrate having a lower surface and an upper surface, a bottom electrical contact disposed along the lower surface of the substrate, a lower mirror portion disposed upon the upper surface of the substrate, an active region disposed upon the lower mirror portion, an upper mirror portion disposed upon the active region, an equipotential layer disposed upon the upper mirror portion, an insulating layer interposed between the upper mirror portion and the equipotential layer and adapted to form an aperture therebetween, and an upper contact portion disposed upon the equipotential layer outside the perimeter of the aperture.

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