Method for using field emitter arrays in chemical and...

Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge

Reexamination Certificate

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C588S253000

Type

Reexamination Certificate

Status

active

Patent number

10051970

Description

ABSTRACT:
A method is provided, the method comprising operating a field emitter array (FEA) to generate at least one of a high electric field and a high electron flux, and exposing the field emitter array (FEA) to at least one gas. The method further comprises generating at least one radical species from the at least one gas exposed to the at least one of the high electric field and the high electron flux.

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Chalamala et al. (“Interaction of H2O with active Spindt-Type molybdenum field emitter arrays”, J. Vac. Sci. Technol. B, 17(2), pp. 303-305, 1999.
Material Safety Data Sheet (MSDS) of Molybdenum obtained from Alfa Aesar Co., May 30, 2000.
MSDS of Methane obtained from Airgas Inc, Jan. 3, 2001).
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Chalamala et al., “Surface Conditioning of Active Molybdenum Field Emission Cathode Arrays with H2and Helium,”J. Vac. Sci. Technol. Bvol. 16:2855-2858 (1998).
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Wallace et al., “Effects of Residual Gas Exposures on the Emission Characteristics of Field Emission Arrays,”AVS National Symposium, Abstract No. FP+VT-MoM3 (Oct. 25, 1999).
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Wallace et al., “Field Emission Displays and Vacuum Packaging Issues,”Flat Panel Display Topical Conference 46thAVS International Symposium(1996).

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