Method of producing ceramic diaphragm structure having convex di

Details Method of producing ceramic diaphragm structure having convex di Method of producing ceramic diaphragm structure having convex di

1995-08-31

1997-06-03

Czaja, Donald E.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

C03B 2904, C04B 3700

Patent

active

056349998

ABSTRACT:
A method of producing a ceramic diaphragm structure, including a ceramic substrate having at least one window, and a ceramic diaphragm plate superposed on the ceramic substrate to close the window or windows. The method includes the steps of: firing the diaphragm plate with the ceramic substrate to form an integral sintered body, such that the diaphragm plate provides at least one diaphragm portion aligned with the window or windows; protruding each diaphragm portion outwards, in a direction away from the corresponding window, so that the diaphragm portion is formed into a convex shape; and controlling the amount of protrusion of the diaphragm portion, by pressing a jig having a flat surface or a concave surface, against a top part of the diaphragm portion having the convex shape, so that at least the top part has a flat surface or a curved surface having a predetermined radius of curvature.

REFERENCES:
patent: 4894635 (1990-01-01), Yajima et al.
patent: 5089455 (1992-02-01), Ketcham et al.
patent: 5210455 (1993-05-01), Takeuchi et al.
patent: 5255427 (1993-10-01), Hafner
patent: 5517076 (1996-05-01), Takeuchi et al.

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