Piezoelectric/electrostrictive device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C347S071000, C347S072000

Reexamination Certificate

active

11282013

ABSTRACT:
A piezoelectric/electrostrictive device includes: a ceramic substrate having a frame-like thick portion, a thin diaphragm portion, and a cavity formed by the thick portion and the thin diaphragm portion to communicate with the outside; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high.

REFERENCES:
patent: 5545461 (1996-08-01), Takeuchi et al.
patent: 5774961 (1998-07-01), Takeuchi et al.
patent: 5852337 (1998-12-01), Takeuchi et al.
patent: 5889351 (1999-03-01), Okumura et al.
patent: 5997671 (1999-12-01), Takeuchi et al.
patent: 6108880 (2000-08-01), Takeuchi et al.
patent: 6348115 (2002-02-01), Takeuchi et al.
patent: 6407481 (2002-06-01), Takeuchi et al.
patent: 6541895 (2003-04-01), Yamaguchi
patent: H08-201265 (1996-08-01), None
patent: 2000351213 (2000-12-01), None
patent: 2002-261347 (2002-09-01), None
U.S. Appl. No. 11/089,113, filed Mar. 24, 2005, Yamaguchi et al.
U.S. Appl. No. 11/281,645, filed Nov. 17, 2005, Nanataki et al.

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