Physical quantity sensor having angular speed sensor and...

Measuring and testing – Speed – velocity – or acceleration – Response to multiple sensing means or motion conditions

Reexamination Certificate

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C073S504120

Reexamination Certificate

active

11079246

ABSTRACT:
A physical quantity sensor includes: a substrate; an angular speed sensor disposed on the substrate; and an acceleration sensor disposed on the substrate. The angular speed sensor includes an oscillator capable of oscillating by a driving force and displaceable in accordance with a Coriolis force attributed to an angular speed of the oscillator. The acceleration sensor includes a movable portion displaceable in accordance with an acceleration applied to the acceleration sensor. The oscillator has a driving direction, which is not parallel to a displacement direction of the movable portion. The physical quantity sensor having the angular speed sensor and the acceleration sensor detects both of the angular speed and the acceleration with high accuracy.

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Notice of Reason for Refusal from Japanese Patent Office issued on Mar. 17, 2006 for the corresonding Japanese patent application No. 2004-099739 (a copy and English translation thereof).
Notice of Reason for Refusal from Japanese Patent Office issued on Apr. 2, 2007 for the corresponding Japanese patent application No. 2004-099739 (a copy and English translation thereof).

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