Cyanoadamantyl compounds and polymers

Details Cyanoadamantyl compounds and polymers Cyanoadamantyl compounds and polymers

2007-12-18

2007-12-18

Chu, John S. (Department: 1752)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C430S270100, C430S905000, C430S910000

Reexamination Certificate

active

11075545

ABSTRACT:
Cyanoadamantyl compounds, polymers that comprise polymerized units of such compounds, and photoresist compositions that comprise such polymers are provided. Preferred polymers of the invention are employed in photoresists imaged at wavelengths less than 250 nm such as 248 nm and 193 nm.

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