Surface acoustic wave element

Details Surface acoustic wave element Surface acoustic wave element

2007-10-16

2007-10-16

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S344000

Reexamination Certificate

active

10543808

ABSTRACT:
A highly reliable surface acoustic wave device includes a low-resistance piezoelectric substrate that is difficult to reoxidize even in a high-temperature atmosphere containing oxygen. The piezoelectric substrate has a specific resistance of about 1.0×107Ω·cm to about 1.0×1013Ω·cm, an interdigital electrode on a main surface of the substrate, and a protective film covering the interdigital electrode.

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