Probe device and probe method

Details Probe device and probe method Probe device and probe method

2007-06-26

2007-06-26

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S758010

Reexamination Certificate

active

10496007

ABSTRACT:
A probe device20having a contact load monitoring device10. This contact load monitoring device measures the displacement of a loading table caused by a contact load exerted on the mounting table from a probe in an overdrive by means of a displacement sensor11disposed in the space below the mounting table as a sinkage quantity. This sinkage quantity is collated with a correlation table to determine the contact load. If the contact load is less than the designed contact load, the mounting table is further overdriven.

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patent: 2001-228212 (2001-08-01), None

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