Method and apparatus for testing semiconductor device

Details Method and apparatus for testing semiconductor device Method and apparatus for testing semiconductor device

1993-05-26

1996-06-04

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

361225, G01R 3126, H01T 1900

Patent

active

055236995

ABSTRACT:
An apparatus for testing a semiconductor device includes an insulation body on which an IC to be tested is placed; a high voltage source for generating an electrostatic charge; a capacitor and resistor; a variable discharge gap defined by a metal piece and a discharge electrode; a fixed discharge gap; a discharge resistor inserted into the discharge circuit; and a switch for conducting the electrostatic charge into the discharge circuit. When a high voltage is applied to the terminal to be tested in the IC, a corona or spark is generated at the discharge gap and the current is on rapidly into the terminal to be tested. Thus, a condition very similar to the actual electrostatic discharge phenomenon is reproduced.

REFERENCES:
patent: 4636724 (1987-01-01), Fukuda et al.
patent: 4677375 (1987-06-01), Nakaie et al.
patent: 4823088 (1989-04-01), Fukuda

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