Diamond film depositing apparatus using microwaves and plasma

Details Diamond film depositing apparatus using microwaves and plasma Diamond film depositing apparatus using microwaves and plasma

2007-02-06

2007-02-06

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345360, C156S345410, C156S345420, C156S345460, C156S345490, C315S111210

Reexamination Certificate

active

10471216

ABSTRACT:
Disclosed herewith is a diamond film depositing apparatus using microwaves and plasma. The apparatus comprises a rectangular wave guide (125), a mode transition coupler (120), an antenna rod (130), a quartz bell jar (140), a workpiece holder (116), a microwave cavity resonator (112), a source gas inflow ring (160), a mechanical support cylinder (164), a cooling jacket (165), gas inflow and outflow conduits (172and174) and a vacuum seal (190). The microwave cavity resonator (112) has a cylindrical shape the diameter of which is decreased in a downward direction. The microwave cavity resonator (112) may have a hemispherical shape, the flat surface of which is oriented upward.

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International Search Report—PCT/KR01/00487; ISA/Austrian Patent Office, Date Completed: Jun. 18, 2001.

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