Stage device and exposure apparatus

Details Stage device and exposure apparatus Stage device and exposure apparatus

2007-10-16

2007-10-16

Nguyen, Tran (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C335S053000, C335S055000, C335S072000, C074S409000, C074S4710XY

Reexamination Certificate

active

11074642

ABSTRACT:
An exposure apparatus which aligns a substrate by a stage device for driving a movable element, mounted with a substrate thereon, by using a plane motor. The stage device includes (i) a stator unit having a coil group, and (ii) the movable element, which moves on the stator unit. The stator unit includes (a) an exposure region where the substrate is to be subjected to a process of exposing the substrate, and (b) a measurement region where the substrate is to be subjected to a process of measuring a position of the substrate. The coil group in the stator unit is temperature-controlled independently between the exposure region and the measurement region.

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Korean Office Action dated Jul. 31, 2006, issued in corresponding Korean patent application No. 10-2005-0024323.

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