Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Compositions to be polymerized by wave energy wherein said...
Reexamination Certificate
2007-08-14
2007-08-14
Berman, Susan (Department: 1711)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Compositions to be polymerized by wave energy wherein said...
C522S016000, C522S023000, C522S031000, C522S039000, C522S042000, C522S046000, C522S053000, C522S064000, C522S066000, C522S083000, C522S157000, C522S158000, C522S161000
Reexamination Certificate
active
10703800
ABSTRACT:
Disclosed are photo or electron beam polymerizable compositions, and preparation thereof and devices containing them. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 157 nm lithographic tools.
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Coykendall Kelsee L.
Dewa Paul G.
Sabia Robert
Sauer David C.
Shustack Paul J.
Berman Susan
Corning Incorporated
Santandrea Robert P.
Siwen Chen
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