High-frequency power source

Details High-frequency power source High-frequency power source

2007-11-06

2007-11-06

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

C324S642000, C324S076110, C324S076190

Reexamination Certificate

active

11391115

ABSTRACT:
A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.

REFERENCES:
patent: 7122965 (2006-10-01), Goodman
patent: 2003/0178140 (2003-09-01), Hanazaki et al.
patent: 2003/0184319 (2003-10-01), Nishimori et al.
patent: 5-63604 (1993-03-01), None

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