Mirror with local deformation by thickness variation of an...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S295000, C359S846000, C359S872000, C359S883000

Reexamination Certificate

active

11228335

ABSTRACT:
A deformable mirror comprises i) an electrically insulative substrate having a substantially plane front face, ii) a first stage comprising at least two plane electrodes placed at chosen places on top of said front face of the substrate, iii) a first layer of electro-active material placed in contact with the front face of the electrodes of said first stage and adapted to be deformed locally under the action of a chosen local difference of electric potential, iv) an electrically conductive reflecting layer, defining a ground electrode connected to an electric ground and placed on top of the front face of said first electro-active layer, and v) first electric power supply circuits each connected, on the one hand, to said electric ground and, on the other hand, to at least one of the electrodes of said first stage in such a manner as to impose locally, on command, a chosen potential difference adapted to deform locally an area of the first electro-active layer placed substantially in line with said electrode.

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patent: 7034432 (2006-04-01), Pelrine et al.
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patent: 2003/0166773 (2003-09-01), Chen
patent: 0 793 120 (1997-09-01), None
patent: 1 637 914 (2006-03-01), None
T. Weyrauch et al, “Performance Evaluation of Micromachined Mirror Arrays for Adaptive optics” Proceedings of the SPIE—The International Society for Optical Engineering Soc. Opt. Eng, vol. 4124, 2000, pp. 32-41, XP00232350.
Claire Divoux: “A Micromachined Micromachined Deformable Mirror for Adaptive Optics”, Online! 2003, XP002323249.

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