Lithographic apparatus and a device manufacturing method

Details Lithographic apparatus and a device manufacturing method Lithographic apparatus and a device manufacturing method

2007-11-06

2007-11-06

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S077000

Reexamination Certificate

active

10882671

ABSTRACT:
A lithographic apparatus and device manufacturing method are disclosed. The apparatus includes an illumination system for conditioning a beam of radiation, and a support structure for supporting a patterning device. The patterning device serves to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and at least one fastener for fastening a first part of the apparatus to a second part of the apparatus. The fastener includes a shaft having a first threaded section and a second threaded section. The first threaded section and the second threaded section have different pitches.

REFERENCES:
patent: 6019556 (2000-02-01), Hess
patent: 6246202 (2001-06-01), Lee
patent: 2002/0022843 (2002-02-01), Michelson
patent: 2002/0097205 (2002-07-01), Nakamura

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