Etching a substrate: processes – Forming or treating thermal ink jet article
Reexamination Certificate
2007-02-13
2007-02-13
Olsen, Allan (Department: 1763)
Etching a substrate: processes
Forming or treating thermal ink jet article
C216S056000
Reexamination Certificate
active
11071261
ABSTRACT:
A method of fabricating inkjet nozzles on a substrate is provided. Each nozzle comprises a nozzle chamber and an actuator positioned in the nozzle chamber. Each nozzle chamber comprises a roof having a nozzle aperture defined therein and sidewalls extending from the roof to the substrate. The method comprises the steps of: (a) depositing a layer of first sacrificial material onto the substrate; (b) defining actuator scaffolds in the first sacrificial material (c) depositing actuator material onto the actuator scaffolds; (d) etching the actuator material to define actuators; (e) depositing a layer of second sacrificial material onto the actuators, the first sacrificial material and/or the substrate; (f) defining openings in the second sacrificial material, the openings being complementary to chamber sidewalls; (g) depositing roof material onto the sacrificial material and into the openings, thereby forming the roof and sidewalls of each chamber; (h) etching nozzle apertures through each roof; and (i) removing the first and second sacrificial materials exposed through the nozzle apertures.
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Olsen Allan
Silverbrook Research Pty Ltd
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