Optics: measuring and testing – Position or displacement
Reexamination Certificate
2007-11-20
2007-11-20
Punnoose, Roy M. (Department: 2886)
Optics: measuring and testing
Position or displacement
C356S620000
Reexamination Certificate
active
10771992
ABSTRACT:
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in a partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
REFERENCES:
patent: 6507388 (2003-01-01), Burghoorn
patent: 2001/0055100 (2001-12-01), Murakami
patent: 2002/0080338 (2002-06-01), Taniguchi
patent: 2003/0095241 (2003-05-01), Burghoorn
Mishima Kazuhiko
Sato Hiroshi
Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
Punnoose Roy M.
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