Position sensor

Optics: measuring and testing – Position or displacement

Reexamination Certificate

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Details

C356S620000

Reexamination Certificate

active

10771992

ABSTRACT:
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in a partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.

REFERENCES:
patent: 6507388 (2003-01-01), Burghoorn
patent: 2001/0055100 (2001-12-01), Murakami
patent: 2002/0080338 (2002-06-01), Taniguchi
patent: 2003/0095241 (2003-05-01), Burghoorn

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