Black fringe wavefront sensor

Details Black fringe wavefront sensor Black fringe wavefront sensor

2007-10-16

2007-10-16

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11258219

ABSTRACT:
A method of performing closed loop correction of phase aberrations, including the steps of directing an incoming light beam into a black fringe wavefront sensor via an adaptive optical device (“AOD”), dividing the incoming light beam into measurement and reference beams, altering the path length of the measurement beam and the location of the black fringe by modulating a ramp voltage of a modulator, combining the measurement and reference beams into a common output beam, detecting the black fringe in the common output beam using detectors mapped to the AOD, storing, as tagged ramp voltages, a corresponding ramp voltage for each detector when it detects black fringe, calculating phase errors based upon the tagged ramp voltages and modulator scaling, calculating adaptive optics correction voltages based upon the phase errors, transmitting and applying the correction voltages to the AOD to correct phase aberrations of the incoming light beam via phase conjugation.

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Schrader, Implementation of an actively controlled white light interferometer for measurement of sub-wavelength structural distances, SPIE, vol. 3430, Jul. 1998, pp. 293-303.

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