Projection exposure apparatus and method, catadioptric...

Details Projection exposure apparatus and method, catadioptric... Projection exposure apparatus and method, catadioptric...

2007-11-27

2007-11-27

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S066000

Reexamination Certificate

active

09769832

ABSTRACT:
A projection exposure apparatus includes a projection optical system, which is arranged in an optical path between a first surface and a second surface, projects a pattern on a negative plate arranged on the first surface onto a workpiece arranged on the second surface and exposes the pattern thereon. The projection optical system includes a first imaging optical subsystem having a dioptric imaging optical system; a second imaging optical subsystem having a concave reflecting system; a third imaging optical subsystem having a dioptric imaging optical system; a first folding mirror arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and a second folding mirror arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem. The first imaging optical subsystem forms a first intermediate image and the second imaging optical subsystem forms a second intermediate image.

REFERENCES:
patent: 3574459 (1971-04-01), Hartwig et al.
patent: 4678321 (1987-07-01), Inokuchi
patent: 4736225 (1988-04-01), Tanaka et al.
patent: 5140459 (1992-08-01), Sagan
patent: 5473410 (1995-12-01), Nishi
patent: 5557469 (1996-09-01), Markle et al.
patent: 5559629 (1996-09-01), Sheets et al.
patent: 5576895 (1996-11-01), Ikeda
patent: 5636066 (1997-06-01), Takahashi
patent: 5638223 (1997-06-01), Ikeda
patent: 5689377 (1997-11-01), Takahashi
patent: 5694241 (1997-12-01), Ishiyama et al.
patent: 5739964 (1998-04-01), Allen
patent: 5805334 (1998-09-01), Takahashi
patent: 5835284 (1998-11-01), Takahashi et al.
patent: 5850300 (1998-12-01), Kathman et al.
patent: 5852518 (1998-12-01), Hatasawa et al.
patent: 5861997 (1999-01-01), Takahashi
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6246204 (2001-06-01), Ebihara et al.
patent: 6249382 (2001-06-01), Komatsuda
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6327022 (2001-12-01), Nishi
patent: 6337162 (2002-01-01), Irie
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6381077 (2002-04-01), Jeong et al.
patent: 6512631 (2003-01-01), Shafer et al.
patent: 6677088 (2004-01-01), Magome et al.
patent: 6717746 (2004-04-01), Epple et al.
patent: 6909492 (2005-06-01), Omura
patent: 2002/0145711 (2002-10-01), Magome et al.
patent: 2002/0196533 (2002-12-01), Shafer et al.
patent: 2003/0020888 (2003-01-01), Tanaka et al.
patent: 2004/0104359 (2004-06-01), Komatsuda et al.
patent: 0 855 623 (1998-07-01), None
patent: 0 951 054 (1999-10-01), None
patent: 1 020 897 (2000-07-01), None
patent: 1 030 351 (2000-08-01), None
patent: 1 043 625 (2000-10-01), None
patent: 1 069 600 (2001-01-01), None
patent: 2 290 658 (1996-01-01), None
patent: A 4-196513 (1992-07-01), None
patent: A-6-250074 (1994-09-01), None
patent: A 6-250074 (1994-09-01), None
patent: A-6-265789 (1994-09-01), None
patent: A 6-300955 (1994-10-01), None
patent: A 6-349699 (1994-12-01), None
patent: A 7-86152 (1995-03-01), None
patent: A-7-168116 (1995-07-01), None
patent: A 8-62502 (1996-03-01), None
patent: A 8-63231 (1996-03-01), None
patent: A 8-327895 (1996-12-01), None
patent: A-9-312254 (1997-12-01), None
patent: A 10-163097 (1998-06-01), None
patent: A 10-163098 (1998-06-01), None
patent: A 10-163100 (1998-06-01), None
patent: A 10-209039 (1998-08-01), None
patent: A 10-214783 (1998-08-01), None
patent: A 11-84199 (1999-03-01), None
patent: A-11-84199 (1999-03-01), None
patent: A 10-163099 (1999-06-01), None
patent: A 11-194479 (1999-07-01), None
patent: A-11-194479 (1999-07-01), None
patent: A 11-219902 (1999-08-01), None
patent: A-11-231192 (1999-08-01), None
patent: A 11-231192 (1999-08-01), None
patent: A 11-251217 (1999-09-01), None
patent: A-2000-12453 (2000-01-01), None
patent: A 2000-12453 (2000-01-01), None
patent: A 2000-21765 (2000-01-01), None
patent: A-2000-28898 (2000-01-01), None
patent: A 2000-28898 (2000-01-01), None
patent: A-2000-29202 (2000-01-01), None
patent: A 2000-29202 (2000-01-01), None
patent: A-2000-47114 (2000-02-01), None
patent: WO98/28665 (1998-07-01), None
patent: WO98/40791 (1998-09-01), None
patent: WO99/10917 (1999-03-01), None
patent: WO99/25010 (1999-05-01), None
patent: WO99/34255 (1999-07-01), None
patent: WO99/49505 (1999-09-01), None
patent: WO99/50712 (1999-10-01), None
patent: WO99/66370 (1999-12-01), None
U.S. Appl. No. 09/260,544, filed Mar. 2, 1999, Ebiarra et al.
U.S. Appl. No. 09/340,236, filed Jul. 1, 1999, Komatsuda.
U.S. Appl. No. 09/661,396, filed Mar. 26, 1999, Irie.

Affiliated with

Also associated with

Rating

Projection exposure apparatus and method, catadioptric... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure apparatus and method, catadioptric..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus and method, catadioptric... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3852976