MEMS filter module

Details MEMS filter module MEMS filter module

2007-06-05

2007-06-05

Menon, Krishnan S. (Department: 1723)

Liquid purification or separation

Casing divided by membrane into sections having inlet

Planar membrane

C210S511000, C210S321750, C210S500220, C210S500260, C422S105000, C604S006090, C604S008000

Reexamination Certificate

active

10911424

ABSTRACT:
Various MEMS filter elements or modules are disclosed. One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58). A filter trap chamber (62) is disposed on each side of each filter trap gap (58). Therefore, fluid will flow into one filter trap chamber (62), through a filter trap gap (58), and into another filter trap chamber (62), whether the flow is introduced into the filter module (34) through the first flow ports (74) or the second flow ports (50).

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