System and method for generating a discharge in gases

Details System and method for generating a discharge in gases System and method for generating a discharge in gases

2007-10-16

2007-10-16

Chen, Shih-Chao (Department: 2821)

Coating apparatus

Gas or vapor deposition

With treating means

C315S243000

Reexamination Certificate

active

11082914

ABSTRACT:
A method of generating an electrical discharge in a gas contained in a sealed enclosure. The method includes driving a helical coil resonator at an RF frequency to generate an RF electric-magnetic field sufficient to generate an electrical discharge in the high pressure gas. The electrical discharge produces an emission spectrum that may be spectroscopically analyzed to determine the composition and impurity content of the gas.

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Copies of PCT ISR and WOISA for PCT/US05/09063.
Copies of PCT ISR and WOISA for PCT/US05/09063, No Date.

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