Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2007-02-13
2007-02-13
Kackar, Ram (Department: 1763)
Coating apparatus
Gas or vapor deposition
Work support
C438S020000, C156S345470
Reexamination Certificate
active
10613574
ABSTRACT:
An electrode-built-in susceptor comprises a mounting plate and a supporting plate which are made of an aluminium-nitride-group-sintered member, an inner electrode which is made of a conductive aluminium-nitride-tantalum-nitride-composite-sintered-member or a conductive aluminium-nitride-tungsten-composite-sintered-member so as to be formed between the mounting plate and the supporting plate, power supplying terminals16, 16which is disposed in fixing holes13, 13which are formed on the supporting plate so as to be attached to the inner electrode. The power supplying terminals are made of a conductive aluminium-nitride-tantalum-nitride-composite-sintered-member.By doing this, it is possible to provide an electrode-built-in susceptor which has superior durability under a high temperature oxidizing atmosphere condition and a method for manufacturing an electrode-built-in susceptor with a high product yield and a low production cost.
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English translation of Office Action issued by Japanese Patent Office on Oct. 18, 2005 in connection with corresponding Japanese patent application No. 2002-197970.
Endou Kazunori
Ootsuka Takeshi
Kackar Ram
MacArthur Sylvia R.
Sumitomo Osaka Cement Co. Ltd.
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