Thin film transistor tester and corresponding test method

Details Thin film transistor tester and corresponding test method Thin film transistor tester and corresponding test method

2007-11-13

2007-11-13

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S701000

Reexamination Certificate

active

11163996

ABSTRACT:
To test electrical characteristics of a Thin Film Transistor (TFT) with a source or drain terminal left open and exposed, using a non-contact current source and protecting the TFTs from adverse effects, such as contamination, destruction, and the like. A tester100is provided to test a TFT array substrate14, the tester including ion flow supply devices16and18for supplying an ion flow onto the surface of a substrate14. Thereon, an array12of TFTs is formed, each TFT being connected to an electrode having a source or a drain left open and exposed; a control circuit24for supplying an operating voltage to a gate electrode of the TFT to be tested in the array; and a measurement circuit24for measuring an operating current via the testing TFT source or drain that remain in a non open state.

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