Method for the manufacture of a piezoelectric element

Details Method for the manufacture of a piezoelectric element Method for the manufacture of a piezoelectric element

2007-08-14

2007-08-14

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C029S830000, C029S846000, C029S847000, C347S068000, C310S324000

Reexamination Certificate

active

11382443

ABSTRACT:
A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm30(31, 32) on a substrate20(S1); a step of forming a bottom electrode33on the diaphragm30(S2); a step of forming a first piezoelectric layer43aon the bottom electrode33(S3); a step of patterning both the piezoelectric layer43aand the bottom electrode33(S4); a step of forming a second piezoelectric layer on the piezoelectric layer43aand on the diaphragm30to mature a piezoelectric film43(S5); and a step of forming a top electrode44on the piezoelectric film43(S6).

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