Polymerizable fluorinated ester compounds and their...

Details Polymerizable fluorinated ester compounds and their... Polymerizable fluorinated ester compounds and their...

2007-12-25

2007-12-25

Eyler, Yvonne (Department: 1621)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C570S136000, C570S142000, C570S182000, C570S186000

Reexamination Certificate

active

10958373

ABSTRACT:
Polymerizable fluorinated ester compounds having formulae (1) and (2) are novel wherein R1is H, methyl or trifluoromethyl, R2and R3are H or a monovalent hydrocarbon group, R2and R3may form a ring, R4is H, OH or a monovalent hydrocarbon group, and R5is an acid labile group. They are useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions which have high transparency to radiation having a wavelength of up to 500 nm and exhibit good development properties due to the presence of phenol-like acidic hydroxyl groups

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