Method of fabricating an EL display device, and apparatus...

Details Method of fabricating an EL display device, and apparatus... Method of fabricating an EL display device, and apparatus...

2007-08-21

2007-08-21

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C118S719000

Reexamination Certificate

active

10902792

ABSTRACT:
A plurality of processing chambers are connected to a common chamber (103in FIG.1), and they comprehend a processing chamber for oxidation (107), a processing chamber for solution application (108), a processing chamber for baking (109), and processing chambers for vapor-phase film formation (110, 111). Owing to a thin-film forming apparatus of such construction, it is permitted to fabricate an EL (electroluminescence) element employing a high-molecular EL material, without touching the open air. Thus, an EL display device of high reliability can be fabricated.

REFERENCES:
patent: 4885211 (1989-12-01), Tang et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5067218 (1991-11-01), Williams
patent: 5135608 (1992-08-01), Okutani
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5512320 (1996-04-01), Turner et al.
patent: 5550066 (1996-08-01), Tang et al.
patent: 5643685 (1997-07-01), Torikoshi
patent: 5695564 (1997-12-01), Imahashi
patent: 5817366 (1998-10-01), Arai et al.
patent: 5943600 (1999-08-01), Ngan et al.
patent: 6001413 (1999-12-01), Matsuura et al.
patent: 6049167 (2000-04-01), Onitsuka et al.
patent: 6132280 (2000-10-01), Tanabe et al.
patent: 6280861 (2001-08-01), Hosokawa et al.
patent: 6432561 (2002-08-01), Yamazaki
patent: 6440261 (2002-08-01), Tepman et al.
patent: 6528108 (2003-03-01), Kawamura
patent: 6821553 (2004-11-01), Miyashita et al.
patent: 6833156 (2004-12-01), Miyashita et al.
patent: 6838192 (2005-01-01), Miyashita et al.
patent: 6863961 (2005-03-01), Miyashita et al.
patent: 2001/0001050 (2001-05-01), Miyashita et al.
patent: 2002/0041926 (2002-04-01), Miyashita et al.
patent: 2002/0084032 (2002-07-01), Jeng et al.
patent: 2002/0136823 (2002-09-01), Miyashita et al.
patent: 2002/0155215 (2002-10-01), Miyashita et al.
patent: 2003/0054186 (2003-03-01), Miyashita et al.
patent: 2005/0042477 (2005-02-01), Miyashita et al.
patent: 0 408 216 (1991-01-01), None
patent: 0 859 539 (1998-08-01), None
patent: 0 865 229 (1998-09-01), None
patent: 0 880 303 (1998-11-01), None
patent: 1 211 916 (2002-06-01), None
patent: 1 376 716 (2004-01-01), None
patent: 1 376 717 (2004-01-01), None
patent: 60-121616 (1985-06-01), None
patent: 10-012377 (1998-01-01), None
patent: 10-153967 (1998-06-01), None
patent: 10-214682 (1998-08-01), None
patent: 10-241858 (1998-09-01), None
patent: 172159 (1999-03-01), None
Bunshah, “Handbook of Deposition Technologies for Films and Coatings”, pp. 462-464, 1994.
Machine Translation of 10-214682.
Specification and Drawings of U.S. Appl. No. 09/724,002, “Film Deposition Apparatus and A Method of Manufacturing A Light Emitting Device Using The Apparatus”, Shunpei Yamazaki et al., Nov. 28, 2000.
European Search Report of Mar. 6, 2006 for Application No. 00115329.5.

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