Microscope and sample observation method

Details Microscope and sample observation method Microscope and sample observation method

2007-12-25

2007-12-25

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

Reexamination Certificate

active

11333550

ABSTRACT:
For a semiconductor device S as an inspected object, there are provided an image acquisition part1, an optical system2including an objective lens20, and a solid immersion lens (SIL)3movable between an insertion position including an optical axis from the semiconductor device S to the objective lens20and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL3is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0and a thickness t0of a substrate of the semiconductor device S, and a second mode in which the SIL3is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0and thickness t0of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1of SIL3. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.

REFERENCES:
patent: 4477155 (1984-10-01), Sato et al.
patent: 5004307 (1991-04-01), Kino et al.
patent: 5125750 (1992-06-01), Corle et al.
patent: 5208648 (1993-05-01), Batchelder et al.
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5422498 (1995-06-01), Nikawa et al.
patent: 5764613 (1998-06-01), Yamamoto et al.
patent: 5939709 (1999-08-01), Ghislain et al.
patent: 5940545 (1999-08-01), Kash et al.
patent: 6002792 (1999-12-01), Oguri et al.
patent: 6441359 (2002-08-01), Cozier et al.
patent: 6475398 (2002-11-01), Kitahata
patent: 6594086 (2003-07-01), Pakdaman et al.
patent: 6608359 (2003-08-01), Kitahata
patent: 6621275 (2003-09-01), Cotton et al.
patent: 6656029 (2003-12-01), Kitahata
patent: 6687058 (2004-02-01), Ippolito et al.
patent: 6961672 (2005-11-01), Kasapi
patent: 2001/0053117 (2001-12-01), Ichimura et al.
patent: 2003/0202255 (2003-10-01), Pakdaman et al.
patent: 2003/0210057 (2003-11-01), Cotton et al.
patent: 2006/0109562 (2006-05-01), Arata et al.
patent: 0 977 192 (2000-02-01), None
patent: 05-80247 (1993-04-01), None
patent: 05-157701 (1993-06-01), None
patent: 06-300824 (1994-10-01), None
patent: 7-18806 (1995-03-01), None
patent: 07-190946 (1995-07-01), None
patent: 10-150086 (1998-06-01), None
patent: 11-003534 (1999-01-01), None
patent: 2000-171611 (2000-06-01), None
patent: 2001-023230 (2001-01-01), None
patent: 2001-034998 (2001-02-01), None
patent: 2002-189000 (2002-07-01), None
patent: 2003-502705 (2003-01-01), None
patent: 2003-181672 (2003-07-01), None
patent: WO 00/79313 (2000-12-01), None
patent: 2005/043210 (2005-05-01), None
ISTFA 2003 “Photoemission and OBIRCH Analysis With Solid Immersion Lens (SIL)”, ISTFA 2003, pp. 1-20.
ISTFA Nov. 2003, Conference Proceedings from the 29th International Symposium for Testing and Failure Analysis, pp. 325-329.

Affiliated with

Also associated with

Rating

Microscope and sample observation method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microscope and sample observation method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microscope and sample observation method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3836845