System and method for performing bright field and dark field...

Details System and method for performing bright field and dark field... System and method for performing bright field and dark field...

2007-08-21

2007-08-21

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11170578

ABSTRACT:
A system and method are disclosed for performing bright field and dark field optical inspection. In one embodiment, a system is provided for performing bright field coherent detection by means of an interferometer and dark field detection of scattered light using a single apparatus. In other embodiments, the system is operable to perform dark field detection of scattered light as well as phase measuring through phase shifting or spatial fringe analysis techniques. In yet another embodiment, an additional light source is provided for generating an illumination beam directed obliquely at the substrate to permit capture and detection of scattered light in directions near a normal direction to a surface of the substrate, and in directions away from a normal direction to a surface.

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C. Koliopoulos, “Simultaneous Phase Shift Interferometer,”Advanced Optical Manufacturing and Testing II, Proc. SPIE vol. 1531, pp. 119-127 (1991).

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